In-Line Micro-Scale Form and Surface Texture Measuring Instrument Based on Focus-Variation Microscopy
Papers published in Conference Proceedings
1. Darukumalli S, Santoso T, Syam W, et al. On-machine optical surface topography measurement sensor based on focus variation, Proceedings of the euspen 19th international Conference & Exhibition 2019, pp. 182-185
Oral presentations given
1. Teguh Santoso, Microscale form and surface texture in-situ/in-line small sensor, MICROMAN Micro-and Nano Manufacturing Technologies Workshop at the Euspen International Conference, Bilbao, Spain, June 3rd, 2019.