Integrated Micro Manufacturing Metrology

Integrated Micro Manufacturing Metrology (ESR11). State-of-the-art

Coordinate metrology has been used for decades in the manufacturing industry as the most dominant form of process control, usually employing tactile coordinate measuring machines (CMMs). However, due to the slow speed of tactile systems and the fact that they can only take a limited amount of points, optical CMMs are starting to flourish. On the smaller scale, there are many optical surface measuring devices that tend to be used off-line in industry.

When making small, highprecision, complex components, with difficult to access geometries, it is a combination of the surface measurement systems and the CMMs that is required. This requirement is one of the main aims of the ESR project – to develop a fast, high-accuracy, non-contact measurement system, which can be employed in industry. The original and innovative aspect of the project lies with the combination of in-line surface texture and form metrology. Calibration methods for both types of instrument are often incompatible and new techniques need to be developed.

Fingerprint concept implementation
Metrology is the key to an implementation of the fingerprint concept. In order for the fingerprint concept to be established, knowledge about the geometry and surface texture has been manufactured is necessary. Manufacturing tolerances will be included into the concept. For this, it is essential that the measurement uncertainties of the metrology systems are quantified.

Expected progress beyond current state-of-the-art
The work of ESR11 will be to develop a multi-scale measurement system, capable of both form and texture measurement, whilst also operating with a high temporal bandwidth (i.e. fast, for in-line measurement). The combination of high spatial and temporal bandwidth is new and will require intelligent design of instrumentation and sampling strategies. Novel calibration and verification strategies will also be required.